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DateNameTickerSharesChangeValueChangePrice
09/30/2020ENTEGRIS INCENTG0-96,9080-5,722,000 
06/30/2020ENTEGRIS INCENTG96,908-157,3375,722,000-5,661,000$59.05
03/31/2020ENTEGRIS INCENTG254,245-25,58011,383,000-2,633,000$44.77
12/31/2019ENTEGRIS INCENTG279,825-276,59414,016,000-12,169,000$50.09
09/30/2019ENTEGRIS INCENTG556,419-184,57126,185,000-1,469,000$47.06
06/30/2019ENTEGRIS INCENTG740,990-134,66927,654,000-3,598,000$37.32
03/31/2019ENTEGRIS INCENTG875,659-257,23431,252,000-350,000$35.69
12/31/2018ENTEGRIS INCENTG1,132,893183,97531,602,0004,890,000$27.89
09/30/2018ENTEGRIS INCENTG948,918-146,32526,712,000-10,417,000$28.15
06/30/2018ENTEGRIS INCENTG1,095,243-22,33037,129,000-1,763,000$33.90
03/31/2018ENTEGRIS INCENTG1,117,573-59,26438,892,0003,057,000$34.80
12/31/2017ENTEGRIS INCENTG1,176,837-229,47335,835,000-4,737,000$30.45
09/30/2017ENTEGRIS INCENTG1,406,310-640,54540,572,000-4,356,000$28.85
06/30/2017ENTEGRIS INCENTG2,046,855-315,69644,928,000-10,356,000$21.95
03/31/2017ENTEGRIS INCENTG2,362,551-248,36555,284,0008,549,000$23.40
12/31/2016ENTEGRIS INCENTG2,610,916-56,18046,735,000274,000$17.90
09/30/2016ENTEGRIS INCENTG2,667,096-161,93046,461,0005,525,000$17.42
06/30/2016ENTEGRIS INCENTG2,829,0262,829,02640,936,00040,936,000$14.47
03/31/2016ENTEGRIS INCENTG2,813,396262,47538,318,453,00038,284,603,000$13,620.00
12/31/2015ENTEGRIS INCENTG2,550,921178,32033,850,0002,556,000$13.27
09/30/2015ENTEGRIS INCENTG2,372,601-285,24031,294,000-7,431,000$13.19
06/30/2015ENTEGRIS INCENTG2,657,841331,73038,725,0006,881,000$14.57
03/31/2015ENTEGRIS INCENTG2,326,111446,51231,844,0007,015,000$13.69
12/31/2014ENTEGRIS INCENTG1,879,59990,18024,829,0004,251,000$13.21
09/30/2014ENTEGRIS INCENTG1,789,41950,47520,578,000-3,324,000$11.50
06/30/2014ENTEGRIS INCENTG1,738,944300,87923,902,0006,487,000$13.75
03/31/2014ENTEGRIS INCENTG1,438,065-108,35517,415,000-508,000$12.11
12/31/2013ENTEGRIS INCENTG1,546,420-9,30517,923,0002,117,000$11.59
09/30/2013ENTEGRIS INCENTG1,555,7251,555,72515,806,00015,806,000$10.16
06/30/2013ENTEGRIS INCENTG1,300,340-19,23012,204,000-806,960$9.39
03/31/2013ENTEGRIS INCENTG1,319,57042,77013,010,9601,289,936$9.86
12/31/2012ENTEGRIS INCENTG1,276,800327,22511,721,02411,720,024$9.18
09/30/2012ENTEGRIS INCENTG949,575-390,9001,000-11,326,014$0.00
06/30/2012ENTEGRIS INCENTG1,340,4751,340,47511,327,01411,327,014$8.45
03/31/2012ENTEGRIS INCENTG1,357,455-515,45012,773,652-3,576,809$9.41
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