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| Date | Name | Ticker | Shares | Change | Value | Change | Price |
| 09/30/2020 | ENTEGRIS INC | ENTG | 0 | -96,908 | 0 | -5,722,000 | |
| 06/30/2020 | ENTEGRIS INC | ENTG | 96,908 | -157,337 | 5,722,000 | -5,661,000 | $59.05 |
| 03/31/2020 | ENTEGRIS INC | ENTG | 254,245 | -25,580 | 11,383,000 | -2,633,000 | $44.77 |
| 12/31/2019 | ENTEGRIS INC | ENTG | 279,825 | -276,594 | 14,016,000 | -12,169,000 | $50.09 |
| 09/30/2019 | ENTEGRIS INC | ENTG | 556,419 | -184,571 | 26,185,000 | -1,469,000 | $47.06 |
| 06/30/2019 | ENTEGRIS INC | ENTG | 740,990 | -134,669 | 27,654,000 | -3,598,000 | $37.32 |
| 03/31/2019 | ENTEGRIS INC | ENTG | 875,659 | -257,234 | 31,252,000 | -350,000 | $35.69 |
| 12/31/2018 | ENTEGRIS INC | ENTG | 1,132,893 | 183,975 | 31,602,000 | 4,890,000 | $27.89 |
| 09/30/2018 | ENTEGRIS INC | ENTG | 948,918 | -146,325 | 26,712,000 | -10,417,000 | $28.15 |
| 06/30/2018 | ENTEGRIS INC | ENTG | 1,095,243 | -22,330 | 37,129,000 | -1,763,000 | $33.90 |
| 03/31/2018 | ENTEGRIS INC | ENTG | 1,117,573 | -59,264 | 38,892,000 | 3,057,000 | $34.80 |
| 12/31/2017 | ENTEGRIS INC | ENTG | 1,176,837 | -229,473 | 35,835,000 | -4,737,000 | $30.45 |
| 09/30/2017 | ENTEGRIS INC | ENTG | 1,406,310 | -640,545 | 40,572,000 | -4,356,000 | $28.85 |
| 06/30/2017 | ENTEGRIS INC | ENTG | 2,046,855 | -315,696 | 44,928,000 | -10,356,000 | $21.95 |
| 03/31/2017 | ENTEGRIS INC | ENTG | 2,362,551 | -248,365 | 55,284,000 | 8,549,000 | $23.40 |
| 12/31/2016 | ENTEGRIS INC | ENTG | 2,610,916 | -56,180 | 46,735,000 | 274,000 | $17.90 |
| 09/30/2016 | ENTEGRIS INC | ENTG | 2,667,096 | -161,930 | 46,461,000 | 5,525,000 | $17.42 |
| 06/30/2016 | ENTEGRIS INC | ENTG | 2,829,026 | 2,829,026 | 40,936,000 | 40,936,000 | $14.47 |
| 03/31/2016 | ENTEGRIS INC | ENTG | 2,813,396 | 262,475 | 38,318,453,000 | 38,284,603,000 | $13,620.00 |
| 12/31/2015 | ENTEGRIS INC | ENTG | 2,550,921 | 178,320 | 33,850,000 | 2,556,000 | $13.27 |
| 09/30/2015 | ENTEGRIS INC | ENTG | 2,372,601 | -285,240 | 31,294,000 | -7,431,000 | $13.19 |
| 06/30/2015 | ENTEGRIS INC | ENTG | 2,657,841 | 331,730 | 38,725,000 | 6,881,000 | $14.57 |
| 03/31/2015 | ENTEGRIS INC | ENTG | 2,326,111 | 446,512 | 31,844,000 | 7,015,000 | $13.69 |
| 12/31/2014 | ENTEGRIS INC | ENTG | 1,879,599 | 90,180 | 24,829,000 | 4,251,000 | $13.21 |
| 09/30/2014 | ENTEGRIS INC | ENTG | 1,789,419 | 50,475 | 20,578,000 | -3,324,000 | $11.50 |
| 06/30/2014 | ENTEGRIS INC | ENTG | 1,738,944 | 300,879 | 23,902,000 | 6,487,000 | $13.75 |
| 03/31/2014 | ENTEGRIS INC | ENTG | 1,438,065 | -108,355 | 17,415,000 | -508,000 | $12.11 |
| 12/31/2013 | ENTEGRIS INC | ENTG | 1,546,420 | -9,305 | 17,923,000 | 2,117,000 | $11.59 |
| 09/30/2013 | ENTEGRIS INC | ENTG | 1,555,725 | 1,555,725 | 15,806,000 | 15,806,000 | $10.16 |
| 06/30/2013 | ENTEGRIS INC | ENTG | 1,300,340 | -19,230 | 12,204,000 | -806,960 | $9.39 |
| 03/31/2013 | ENTEGRIS INC | ENTG | 1,319,570 | 42,770 | 13,010,960 | 1,289,936 | $9.86 |
| 12/31/2012 | ENTEGRIS INC | ENTG | 1,276,800 | 327,225 | 11,721,024 | 11,720,024 | $9.18 |
| 09/30/2012 | ENTEGRIS INC | ENTG | 949,575 | -390,900 | 1,000 | -11,326,014 | $0.00 |
| 06/30/2012 | ENTEGRIS INC | ENTG | 1,340,475 | 1,340,475 | 11,327,014 | 11,327,014 | $8.45 |
| 03/31/2012 | ENTEGRIS INC | ENTG | 1,357,455 | -515,450 | 12,773,652 | -3,576,809 | $9.41 |
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